Semiconductor device

ABSTRACT

A semiconductor device in which a main current flows in a direction of thickness of a semiconductor substrate and which offers satisfactory performance and breakdown voltage and also satisfactory mechanical strength of the semiconductor substrate, and which needs no inconvenient control of the exposure system etc. during a photolithography process. The semiconductor device has a semiconductor substrate having a first main surface, a second main surface opposite to the first main surface, and a recess defined in the second main surface by side surfaces and a bottom surface. A semiconductor region is provided in the bottom surface of the recess of the semiconductor substrate, semiconductor regions are provided in the surface of a peripheral region on the second main surface side, and insulating films are provided on the side surfaces of the recess to electrically insulate the semiconductor regions.

TECHNICAL FIELD

The present invention relates to a semiconductor device, andparticularly to a semiconductor device in which the main current flowsin the thickness direction of the semiconductor substrate.

BACKGROUND ART

In general, in a semiconductor device in which the main current flows inthe direction of the thickness of the semiconductor substrate, thebreakdown voltage increases as the semiconductor substrate thicknessincreases to a certain thickness determined by the resistivity of thesubstrate; the breakdown voltage becomes substantially fixed at thecertain thickness or more. On the other hand, increasing thesemiconductor substrate thickness increases the on-state resistance,which increases power dissipation and deteriorates performance.

Thus, with a semiconductor device in which the main current flows in thethickness direction of the semiconductor substrate, the optimumsubstrate thickness is determined in consideration of the balancebetween performance and breakdown voltage.

Also, in semiconductor device manufacturing, there is an optimumsubstrate thickness for preventing problems such as cracking, breakingand bowing of the semiconductor substrate during process steps.

For example, Japanese Patent Application Laid-Open No. 8-213292(referred to as First Patent Document) discloses a structure forreducing the weight of a semiconductor wafer, where a plurality ofrecesses are formed on the back to reduce the weight without loweringthe mechanical strength.

Also, Japanese Patent Application Laid-Open No. 4-192474 (referred to asSecond Patent Document) discloses a structure for preventingunauthorized reading of the circuit pattern provided on a semiconductorchip, where a plurality of recesses are formed on the back of thesemiconductor chip so that the semiconductor chip easily breaks whensubjected to unauthorized reading.

There is an optimum substrate thickness also from the viewpoint ofphotolithography process, since, if the semiconductor substrate isextremely thin, then existing exposure systems etc. need focal depthcontrol during formation of a given pattern by photolithography on thesemiconductor substrate, causing great inconvenience.

Thus, in semiconductor devices in which the main current flows in thethickness direction of the semiconductor substrate, determining thesubstrate thickness requires considering not only the performance andbreakdown voltage but also the mechanical strength of the semiconductorsubstrate and the photolithography processing conditions. Use ofepitaxial-growth substrates is proposed in order to satisfy theseconditions, but thickening epitaxial-growth layers takes time andincreases cost.

DISCLOSURE OF THE INVENTION

An object of the invention is to provide a semiconductor device in whicha main current flows in the thickness direction of the semiconductorsubstrate and which offers satisfactory performance and breakdownvoltage and also satisfactory mechanical strength of the semiconductorsubstrate, and which needs no inconvenient control of the exposuresystem etc. during photolithography process.

According to a first aspect of the invention, in a semiconductor deviceincluding a first main electrode provided on a first main surface of asemiconductor substrate and a second main electrode provided on a secondmain surface of said semiconductor substrate and wherein a main currentflows in a thickness direction of said semiconductor substrate, saidsemiconductor substrate has at least one recess formed in said secondmain surface and therefore at least has a first region having a firstthickness and a second region having a second thickness smaller thansaid first thickness, said second region corresponds to a region wheresaid at least one recess is formed, said second main electrode isprovided in said recess, and said second thickness is set at such athickness as to satisfy the breakdown voltage of said semiconductordevice.

According to the first aspect of the semiconductor device of theinvention, the first thickness, for example, can be set so that thesemiconductor wafer is less likely to crack or break duringmanufacturing and so that no special focal depth control is needed forthe exposure system etc.; this reduces occurrence of defects duringmanufacturing and reduces the manufacturing cost, and offers asemiconductor device achieving a balance between the reduction ofon-state resistance and the sustainment of breakdown voltage.

According to a second aspect of the invention, in a semiconductor deviceincluding a first main electrode provided on a first main surface of asemiconductor substrate and a second main electrode provided on a secondmain surface of said semiconductor substrate and wherein a main currentflows in a thickness direction of said semiconductor substrate, saidsemiconductor substrate has at least one recess formed in said secondmain surface and therefore at least has a first region having a firstthickness and a second region having a second thickness smaller thansaid first thickness, and wherein said second thickness is set at such athickness as to keep a breakdown voltage of said semiconductor device,said second region corresponds to a region where said at least onerecess is formed, said at least one recess is filled with a conductorlayer, and said second main electrode is provided on a surface of saidconductor layer.

According to the second aspect of the semiconductor device of theinvention, the first thickness, for example, can be set so that thesemiconductor wafer is less likely to crack or break duringmanufacturing and so that no special focal depth control is needed forthe exposure system etc.; this reduces occurrence of defects duringmanufacturing and reduces the manufacturing cost, and offers asemiconductor device achieving a balance between reducing the on-stateresistance and keeping the breakdown voltage. Furthermore, filling theat least one recess with a conductor layer enhances the mechanicalstrength of the semiconductor substrate and facilitates handling of thesemiconductor substrate during semiconductor device manufacturingprocess.

Objects, features, aspects and advantages of the present invention willbecome more apparent from the following detailed description of thepresent invention and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view showing the structure of asemiconductor substrate used to manufacture a semiconductor device ofthe present invention;

FIG. 2 is a plan view of the semiconductor substrate for a semiconductordevice of the present invention;

FIG. 3 is a plan view showing the structure of a wafer of semiconductorsubstrates for semiconductor devices of the invention;

FIG. 4 is a cross-sectional view showing the structure of asemiconductor device of a first preferred embodiment of the invention;

FIG. 5 is a cross-sectional view showing the structure of asemiconductor device of a second preferred embodiment of the invention;

FIG. 6 is a cross-sectional view showing the structure of asemiconductor device of a third preferred embodiment of the invention;

FIG. 7 is a cross-sectional view showing the structure of asemiconductor device of a fourth preferred embodiment of the invention;

FIG. 8 is a cross-sectional view showing the structure of asemiconductor device of a fifth preferred embodiment of the invention;

FIG. 9 is a cross-sectional view showing the structure of asemiconductor device of a sixth preferred embodiment of the invention;

FIG. 10 is a cross-sectional view showing another example of structureof the semiconductor substrate for a semiconductor device of theinvention;

FIG. 11 is a cross-sectional view showing another example of structureof the semiconductor substrate for a semiconductor device of theinvention;

FIG. 12 is a cross-sectional view showing another example of structureof the semiconductor substrate for a semiconductor device of theinvention;

FIG. 13 is a plan view showing the structure of a semiconductorsubstrate used to manufacture a semiconductor device of the invention;

FIG. 14 is a plan view showing the structure of a wafer of semiconductorsubstrates for semiconductor devices of the invention;

FIG. 15 is a plan view showing the positioning of dicing lines;

FIG. 16 is a cross-sectional view showing the positioning of the dicinglines;

FIG. 17 is a plan view showing the structure of a semiconductor wafer onwhich dicing lines are positioned;

FIG. 18 is a plan view showing the structure of a semiconductor wafer onwhich dicing lines are positioned;

FIG. 19 is a plan view showing the positioning of field contact rings;

FIG. 20 is a cross-sectional view showing the positioning of the field,contact rings;

FIG. 21 is a plan view showing the structure of a semiconductorsubstrate having a plurality of recesses;

FIG. 22 is a plan view showing the structure of a wafer of semiconductorsubstrates having a plurality of recesses;

FIG. 23 is a plan view showing the structure of a semiconductorsubstrate having a plurality of recesses;

FIG. 24 is a cross-sectional view showing a modification of thestructure of the semiconductor substrate for a semiconductor device ofthe invention;

FIG. 25 is a cross-sectional view showing the structure of asemiconductor substrate used to manufacture a semiconductor device ofthe invention;

FIG. 26 is a plan view showing the structure of a semiconductorsubstrate used to manufacture a semiconductor device of the invention;

FIG. 27 is a plan view showing the structure of a semiconductorsubstrate used to manufacture a semiconductor device of the invention;

FIG. 28 is a cross-sectional view showing the structure of asemiconductor device according to a seventh preferred embodiment of theinvention;

FIG. 29 is a cross-sectional view showing a process step formanufacturing the semiconductor device of the seventh preferredembodiment of the invention;

FIG. 30 is a cross-sectional view showing a process step formanufacturing the semiconductor device of the seventh preferredembodiment of the invention;

FIG. 31 is a cross-sectional view showing a process step formanufacturing the semiconductor device of the seventh preferredembodiment of the invention;

FIG. 32 is a cross-sectional view showing a process step formanufacturing the semiconductor device of the seventh preferredembodiment of the invention;

FIG. 33 is a cross-sectional view showing a process step formanufacturing the semiconductor device of the seventh preferredembodiment of the invention;

FIG. 34 is a cross-sectional view showing a more specific structure ofthe semiconductor device of the seventh preferred embodiment of theinvention;

FIG. 35 is a cross-sectional view showing a more limited application ofthe semiconductor device of the seventh preferred embodiment of theinvention;

FIG. 36 is a cross-sectional view showing the structure of a firstmodification of the semiconductor device of the seventh preferredembodiment of the invention; and

FIG. 37 is a cross-sectional view showing the structure of a secondmodification of the semiconductor device of the seventh preferredembodiment of the invention.

BEST MODE FOR IMPLEMENTING THE INVENTION

Before describing the preferred embodiments of the invention, thestructure of a semiconductor substrate that is common to the preferredembodiments is now described referring to FIGS. 1 to 3.

FIG. 1 is a cross-sectional view of a semiconductor substrate 1 used incommon in the preferred embodiments.

The semiconductor substrate 1 shown in FIG. 1 has a first main surfaceMS1, a second main surface MS2 on the opposite side, and a recess 9defined in the second main surface MS2 by side surfaces 91 and a bottomsurface 92. With the recess 9, the semiconductor substrate 1 has aperipheral region 1A (first region) with a thickness A and a centralregion 1B (second region) with a thickness B which is smaller than thethickness A.

That is to say, the vertical thickness from the bottom surface 92 of therecess 9 to the first main surface MS1 is the thickness B which issmaller than the thickness A.

The thickness A is set so that the semiconductor wafer will not break orcrack during the semiconductor device manufacturing process and so thatthe photolithography process needs no special focal depth control of theexposure system etc. For example, it is set at 500-650 μm with a 6-inchsemiconductor wafer.

The thickness B is determined in consideration of the reduction ofon-state resistance and the requirement of breakdown voltage; forexample, it is set at 60 μm with a semiconductor device having abreakdown voltage of 600 V.

FIG. 2 is a plan view of the semiconductor substrate 1 seen from thefirst main surface MS1 side. As shown in FIG. 2, the recess 9 is locatedsubstantially in the center of the semiconductor substrate 1 and has arectangular shape in plan view. The area around the recess 9 forms theperipheral region 1A with the thickness A. The cross-section along lineX-X seen in the arrow direction in FIG. 2 corresponds to FIG. 1. Therecess 9 may of course be circular or oval, or more complicatedlyshaped, in plan view.

Although the semiconductor substrate 1 shown in FIGS. 1 and 2 is asemiconductor substrate processed into a semiconductor chip, theformation of the recess 9 is performed as a wafer processing step with asemiconductor wafer. FIG. 3 shows recesses 9 corresponding to individualchips in a semiconductor wafer WF1, where a plurality of recesses 9 aredisposed in a matrix on one main surface of the semiconductor wafer WF1.This semiconductor wafer WF1 is diced along given dicing lines to obtaina plurality of semiconductor substrates 1.

A semiconductor device in which the main current flows in the thicknessdirection is manufactured using the semiconductor substrate 1 havingregions with different thicknesses, which provides a first effect thatthe semiconductor wafer is less likely to break or crack, no specialfocal depth control is needed for the exposure system etc., and that thesemiconductor device offers a good balance between the reduction ofon-state resistance and the keeping of breakdown voltage.

Also, on the semiconductor wafer WF1, as shown in FIG. 3, the individualthinner regions have smaller areas relative to the total wafer area,which suppresses bowing of the thinner regions. Even if thesemiconductor chips bow, they bow similarly because all semiconductorchip regions have the same structure, which provides a second effect ofreducing characteristic variations among the semiconductor chips.

Also, with IGBTs (Insulated Gate Bipolar Transistors), for example, theparts relevant to the IGBT characteristics can be formed in the thinnercentral regions 1B so that the radiation energy of the energy beam(electron beam, ion beam, etc.) radiated for carrier lifetime controlcan be reduced. This provides a third effect that the formation depth ofthe lifetime control region can be more precise to enable lifetimecontrol region formation with a smaller distribution width, so as toprovide semiconductor devices with reduced characteristic variations.

Now, the structures of semiconductor devices manufactured using thesemiconductor substrate 1 will be described as first to sixth preferredembodiments of the invention.

A. FIRST PREFERRED EMBODIMENT

FIG. 4 shows the structure of a semiconductor device 100 according to afirst preferred embodiment. As shown in FIG. 4, the semiconductor device100 has the semiconductor substrate 1 described with FIG. 1 and anelectrode ML; the electrode ML is provided all over the second mainsurface MS2 including the side walls 91 and the bottom surface 92 of therecess 9 in the semiconductor substrate 1 and is made of a material thatmakes ohmic contact (or Schottky contact) with the semiconductorsubstrate 1.

When the semiconductor substrate 1 is made of silicon, the ohmic-contactmaterial can be aluminum (Al) or an aluminum alloy.

Also, when the semiconductor substrate 1 is made of silicon, theSchottky-contact material can be titanium (Ti), hafnium (Hf), nickel(Ni), or tungsten (W), for example.

With ohmic contact, no barrier is formed at the junction between themetal and semiconductor layer, so that current can flow in bothdirections. On the other hand, with Schottky contact, a barrier isformed at the junction between the metal and semiconductor layer, sothat current can flow only in one direction but not in the oppositedirection. Therefore Schottky contact can itself constitute a diode(Schottky diode).

Now, when the electrode ML on the second main surface of thesemiconductor substrate 1, where the recess 9 is formed, is made of amaterial that makes ohmic contact, then an IGBT using the ohmicelectrode as its collector electrode, or a diode using the ohmicelectrode as its anode, can be formed to achieve a reduction of theelement resistance in the current flowing state, which structure issuitable for relatively low operating frequency devices.

Also, when the electrode ML is made of a material that makes Schottkycontact, then an IGBT using the Schottky electrode as its collectorelectrode, or a diode using the Schottky electrode as its anodeelectrode, can be formed to obtain an element with reduced powerdissipation at switching, which structure is suitable for relativelyhigh operating frequency devices.

Needless to say, the use of the semiconductor substrate 1 provides thefirst to third effects described earlier.

B. SECOND PREFERRED EMBODIMENT

FIG. 5 shows the structure of a semiconductor device 200 according to asecond preferred embodiment. As shown in FIG. 5, the semiconductordevice 200 has the semiconductor substrate 1 described with FIG. 1 and asemiconductor region IP1 provided in the entire second main surface MS2including the surface of the recess 9 of the semiconductor substrate 1.

The impurity concentration of the semiconductor region IP1 is set higherthan the impurity concentration of the semiconductor substrate 1.

For example, when the impurity concentration of the semiconductorsubstrate 1 is 1×10¹³/cm³ to 1×10¹⁵/cm³, then the impurity concentrationof the semiconductor region IP1 is set at 1×10²⁰/cm³ or higher.

Thus forming the high-concentration semiconductor region IP1 in thesecond main surface MS2 having the recess 9 thins the Schottky barrierso as to make the second main surface MS2 suitable for ohmic contact.

Thus, IGBTs, diodes, and MOSFETs (MOS field effect transistors) withexcellent operating characteristics can be obtained by formingelectrodes relevant to characteristics of the elements, i.e. anodes,cathodes, collectors, drains, etc., in the central region 1B having thethickness B determined in consideration of on-state resistance reductionand breakdown voltage.

Needless to say, the use of the semiconductor substrate 1 provides thefirst to third effects described earlier.

C. THIRD PREFERRED EMBODIMENT

FIG. 6 shows the structure of a semiconductor device 300 according to athird preferred embodiment. As shown in FIG. 6, the semiconductor device300 has the semiconductor substrate 1 described with FIG. 1 and asemiconductor region IP2 provided in the entire second main surface MS2including the surface of the recess 9 of the semiconductor substrate 1.

The impurity conductivity type of the semiconductor region IP2 is setopposite to the impurity conductivity type of the semiconductorsubstrate 1.

For example, when the impurity conductivity type of the semiconductorsubstrate 1 is N type, then the impurity conductivity type of thesemiconductor region IP2 is P type. This provides a diode in which thesecond main surface MS2 side works as the anode.

Reversing the impurity conductivity type of the semiconductor substrate1 and that of the semiconductor region IP2 provides a diode in which thesecond main surface MS2 side works as the cathode.

Needless to say, the use of the semiconductor substrate 1 provides thefirst and second effects described earlier.

D. FOURTH PREFERRED EMBODIMENT

FIG. 7 shows the structure of a semiconductor device 400 according to afourth preferred embodiment. As shown in FIG. 7, the semiconductordevice 400 has the semiconductor substrate 1 described referring to FIG.1 and a semiconductor region IP3 provided in the entire second mainsurface MS2 including the surface of the recess 9 of the semiconductorsubstrate 1.

The impurity conductivity type of the semiconductor region IP3 is thesame as the impurity conductivity type of the semiconductor substrate 1.

For example, when the impurity conductivity type of the semiconductorsubstrate 1 is N type, then the impurity conductivity type of thesemiconductor region IP3 is N type. Then, by forming a P-typesemiconductor region (not shown) on the first main surface MS1 side, adiode having the second main surface MS2 as the cathode can be obtained.

As explained in the second preferred embodiment described referring toFIG. 5, the second main surface MS2 can be made suitable for ohmiccontact by setting the impurity concentration of the semiconductorregion IP3 higher than that of the semiconductor substrate 1.

Needless to say, the use of the semiconductor substrate 1 provides thefirst and second effects described earlier.

E. FIFTH PREFERRED EMBODIMENT

FIG. 8 shows the structure of a semiconductor device 500 according to afifth preferred embodiment. As shown in FIG. 8, the semiconductor device500 has the semiconductor substrate 1 described with FIG. 1, anelectrode ML2 provided on the bottom surface 92 of the recess 9 of thesemiconductor substrate 1, electrodes ML1 provided on the peripheralregion 1A on the second main surface MS2 side, and insulating films ILprovided on the side walls 91 of the recess 9, for electricallyinsulating the electrodes ML1 and ML2.

Thus, by electrically insulating the electrode ML2 on the bottom surface92 of the recess 9 and the electrodes ML1 on the peripheral region 1A ofthe second main surface MS2, it is possible to form semiconductorelements having different functions and characteristics in theperipheral region 1A and in the central region 1B that has the thicknessB determined in consideration of on-state resistance reduction andbreakdown voltage.

F. SIXTH PREFERRED EMBODIMENT

FIG. 9 shows the structure of a semiconductor device 600 according to asixth preferred embodiment. As shown in FIG. 9, the semiconductor device600 has the semiconductor substrate 1 described with FIG. 1, asemiconductor region IP5 provided in the surface of the bottom 92 of therecess 9 of the semiconductor substrate 1, semiconductor regions IP4provided in the surface of the peripheral region 1A on the second mainsurface MS2 side, and insulating films IL provided on the side walls 91of the recess 9, for electrically insulating the semiconductor regionsIP4 and IP5.

Thus, by electrically insulating the semiconductor region IP5 in thesurface of the bottom 92 of the recess 9 and the semiconductor regionsIP4 in the surface of the peripheral region 1A of the second mainsurface MS2, it is possible to form plural kinds of semiconductorelements having different functions and characteristics in theperipheral region 1A and in the central region 1B that has the thicknessB determined by considering on-state resistance reduction and breakdownvoltage.

For example, with a high-resistance N-type substrate used as thesemiconductor substrate 1, a control electrode and a first mainelectrode are formed on the first main surface MS1 and an N-channel MOStransistor is formed on the first main surface MS1 side. And thesemiconductor region IP5 in the surface of the bottom 92 of the recess 9is formed as a P-type semiconductor region and the semiconductor regionsIP4 in the surface of the peripheral region 1A are formed as N-typesemiconductor regions, and second main electrodes are formedrespectively on the semiconductor regions IP4 and IP5.

Then the P-type semiconductor region IP5, the N-type semiconductorsubstrate 1, and the N-channel MOS transistor form an IGBT, and theN-type semiconductor regions IP4, the N-type semiconductor substrate 1,and the P-type semiconductor region forming the N-channel MOS transistorform a diode.

The IGBT and diode operate in a complementary manner when the potentialapplied to the first and second main electrodes is varied, forming ahalf bridge.

While the second main electrodes on the semiconductor regions IP4 andIP5 operate respectively as the cathode and collector electrodes, thearea ratio between the cathode and collector electrodes can be varied byvarying the area of the recess 9.

An energy beam (electron beam, ion beam, etc.) for carrier lifetimecontrol can be applied to the peripheral region 1A from the second mainsurface MS2 side to form a lifetime control region, so as to effectlifetime control only in the peripheral region 1A. It is then possibleto reduce the recovery of the diode without deteriorating IGBToperation.

A more specific structure of the semiconductor device 600 will bedescribed later in a seventh preferred embodiment.

G. OTHER EXAMPLES OF STRUCTURE OF THE SEMICONDUCTOR SUBSTRATE

While the first to sixth preferred embodiments have been describedassuming the use of the semiconductor substrate 1 having two differentthicknesses as shown in FIG. 1, the structure of a substrate havingregions with different thicknesses is not limited to that of FIG. 1.

For example, a substrate having three kinds of thicknesses, like thesemiconductor substrate 2 of FIG. 10, may be used. That is to say, onthe second main surface MS2 opposite to the first main surface MS1, ithas a two-stepped recess 9A having bottom surfaces 93 and 94 atdifferent depths. Thus the semiconductor substrate 2 has a peripheralregion 2A (first region) with a thickness A, a first central region 2B(second region) with a thickness B, and a second central region 2C witha thickness C.

That is to say, the thickness A of the peripheral region 2A is thethickest, and the vertical thickness from the bottom surface 93 of therecess 9A to the first main surface MS1 is the thinnest thickness B, andthe vertical thickness from the bottom surface 94 of the-recess 9A tothe first main surface MS1 is the thickness C, where the thickness C isintermediate between the thickness A and thickness B.

For example, with a 6-inch semiconductor wafer like the semiconductorsubstrate 1, the thickness A and the thickness B are set respectively at500 to 650 μm and 60 μm, and with a semiconductor device with abreakdown voltage of 1200 V, the thickness C is set at 120 μm.

The recess 9A thus has the bottom surfaces 93 and 94 at different depthsand hence the semiconductor substrate 2 has three kinds of thicknesses,which enables formation of more kinds of semiconductor elements.

Three kinds of thicknesses may be formed as shown with the semiconductorsubstrate 3 of FIG. 11. That is to say, it has recesses 9 and 9B atdifferent depths in the second main surface MS2 opposite to the firstmain surface MS1. Thus the semiconductor substrate 3 has a peripheralregion 3A (first region) with a thickness A, a thinnest region 3B(second region) with a thickness B that corresponds to the recess 9, andan intermediate thickness region 3C with a thickness C that correspondsto the recess 9B. The dimensional relation among the thicknesses A, Band C is set like that of the semiconductor substrate 2.

While semiconductor substrates having three kinds of thicknesses havebeen described above, the thickness is not limited to three kinds;semiconductor substrates having three or more kinds of thicknesses canbe obtained by forming a multi-stepped recess or a plurality of recesseswith different depths.

Also, the structure of a semiconductor substrate having two kinds ofthicknesses is not limited to that of the semiconductor substrate 1 ofFIG. 1; the structure may be like that shown in FIG. 12.

That is to say, the semiconductor substrate 4 shown in FIG. 12 has arecess 9 formed in one side area of the second main surface MS2 and itthus has a thinnest region 4B (second region) having a thickness B thatcorresponds to the recess 9 and a peripheral region 4A (first region)having a thickness A around the first region 4B. The side area oppositeto the side area where the recess 9 is formed has no recess andtherefore it forms a uniform thickness region 4C (first region) havingthe single thickness A.

The semiconductor substrate 4 thus structured allows formation of pluralkinds of semiconductor elements having different functions andcharacteristics; in the thinnest region 4B and peripheral region 4A, asemiconductor device in which the main current flows in the substratethickness direction can be formed as in the semiconductor substrate 1,and a semiconductor device in which the main current flows in thesubstrate plane direction can be formed in the single-thickness region4C.

As shown in FIG. 2, the recess 9 of the semiconductor substrate 1 isrectangular-shaped in plan view, surrounded by the peripheral region 1A;however, it may be shaped like a stripe as shown in FIG. 13. That is tosay, the semiconductor substrate 5 shown in FIG. 13 has peripheralregions 5A (first region) only along its two parallel sides and acentral region 5B (second region) between the peripheral regions 5A: thecentral region 5B corresponds to a recess 90 shaped like a stripe. Thecross-section taken along line Y-Y in FIG. 13, seen from the directionof arrows, corresponds to FIG. 1.

When the recess 9 is surrounded by the peripheral region 1A as in thesemiconductor substrate 1 or when the peripheral regions 5A are locatedon both sides of the recess 90 as in the semiconductor substrate 5, therecess 9 or recess 90 is located substantially in the center of thesubstrate. Therefore, when the semiconductor substrate is processed toproduce a semiconductor chip, the semiconductor chip can be placedhorizontally on the die pad during die bonding. That is to say, theperipheral regions on the four sides or two parallel sides come incontact with the die pad so that the semiconductor chip is not inclinedwith respect to the die pad. Thus, during interconnecting process bywire-bonding, the wires and semiconductor chips can always be bonded atthe same angle, enabling uniform wire bonding. This prevents currentconvergence due to non-uniform contact resistance in the bonded parts.

FIG. 14 is a plan view of a semiconductor wafer for obtainingsemiconductor substrates 5 of FIG. 13. FIG. 14 shows a semiconductorwafer WF2 with stripe-like recesses 90; a plurality of stripe-shapedrecesses 90 are arranged in parallel on one main surface of thesemiconductor wafer WF2.

The semiconductor wafer WF2 can be diced along given dicing lines toobtain a plurality of semiconductor substrates 5.

H. RELATION BETWEEN DICING LINES AND RECESSES

After the manufacturing process (wafer process) to the semiconductorwafer, the semiconductor devices 100 to 600 described in the first tosixth preferred embodiments are separated along given dicing lines intoindividual chips.

For example, with the semiconductor substrate 1 shown in FIGS. 1 and 2,the dicing lines and semiconductor substrates 1 are positioned as shownin FIG. 15.

That is to say, a semiconductor substrate 1 is surrounded by verticaldicing lines DL1 and horizontal dicing lines DL2.

FIG. 16 shows the cross-section taken along line W-W in FIG. 15. Asshown in FIG. 16, the areas where the dicing lines DL1 and DL2 arelocated have the thickness A; during dicing, this prevents thesemiconductor substrate 1 from warping when hit by the edge of a dicer,thereby preventing the semiconductor substrate 1 from being damaged andthe dicing lines from being bent.

FIG. 17 is a plan view showing the semiconductor wafer WF1 for obtainingthe semiconductor substrates 1 together with the dicing lines DL1 andDL2 disposed thereon.

FIG. 18 is a plan view showing the semiconductor wafer WF2 for obtainingthe semiconductor substrates 5 together with the dicing lines DL1 andDL2 disposed thereon.

On the semiconductor wafer WF2 of FIG. 18, the vertical dicing lines DL2extend over the stripe-shaped recesses 90 and therefore cut thinnerportions, but the semiconductor substrate 1 will not warp while beingdiced because both sides of the recesses 90 form the thick peripheralregions 1A as mentioned earlier.

I. RELATION BETWEEN FIELD CONTACT RINGS AND RECESSES

The semiconductor devices 100 to 600 of the first to sixth preferredembodiments have not specifically shown the structure of the first mainsurface; with high-voltage semiconductor devices, field contact rings(also called field limiting rings) are often formed in the first mainsurface in order to relax electric fields in the peripheral area of thesemiconductor chip.

Field contact rings contain impurities of a conductivity type oppositeto that of the substrate to form junctions with the substrate; they aredesirably formed in thicker areas to relax electric fields nearly alongthe substrate shape, and thinned areas where recesses are formed are notalways appropriate for field contact rings.

Accordingly, field contact rings FCR may be provided as shown in FIG. 19in the peripheral region 1A surrounding the recess 9 to effectivelyalleviate electric fields vertical to the substrate main surface.

FIG. 20 shows the cross-section along line Z-Z in FIG. 19. As shown inFIG. 20, a sufficient thickness is ensured under the field contact ringsFCR to allow a margin for transient extension of depletion layers.

It is not impossible to provide field contact rings FCR in thesemiconductor substrate 5 having the stripe-shaped recess 90 shown inFIG. 13. That is to say, field contact rings FCR can be formed as longas the thickness B of the central region 5B, corresponding to the recess90, is larger than the depth of the field contact rings FCR andtherefore field contact rings FCR may be formed not only in theperipheral regions 5A of the semiconductor substrate 5 but also acrossthe central region 5B.

Although FIG. 19 shows filed contact rings FCR surrounding just a singlerecess 9, they may be formed also in substrates having a plurality ofrecesses, like the semiconductor substrate 3 shown in FIG. 11.

FIG. 21 shows the structure of a semiconductor substrate 6 having tworecesses 19 in the area surrounded by filed contact rings FCR. In FIG.21, the area other than the recesses 19 is thicker; it can be said thatthe cross-sectional view along U-U in FIG. 21 corresponds to thecross-sectional structure of the semiconductor substrate 3 of FIG. 11and the cross-sectional view along line V-V corresponds to thecross-sectional structure of the semiconductor substrate 4 of FIG. 12.

FIG. 22 is a plan view showing a semiconductor wafer for obtainingsemiconductor substrates having a plurality of recesses, like thesemiconductor substrate 6 shown in FIG. 21. FIG. 22 shows a plurality ofrecesses 19 provided in each chip area on a semiconductor wafer WF3,where the plurality of recesses 19 are disposed in a matrix on one mainsurface of the semiconductor wafer WF3. The semiconductor wafer WF3 isdiced along given dicing lines to obtain a plurality of semiconductorsubstrates 6.

The number of recesses formed in a semiconductor substrate is notlimited to two, and recesses are not necessarily shaped the same and arenot always positioned symmetrically.

For example, in plan view, the semiconductor substrate 60 shown in FIG.23 has rectangular recesses 191 and 192 and an L-shaped recess 193. Therecess 191 and recesses 192 are all rectangular but have differentareas, with just a single recess 191 and a plurality of recesses 192.

A semiconductor wafer for obtaining semiconductor substrates having suchrecesses has a plan view where a plurality of dot-like recesses areformed densely all over one main surface of the semiconductor wafer.

J. MODIFICATIONS OF THE SEMICONDUCTOR SUBSTRATE

In the semiconductor substrates 1 to 6 described so far, the sidesurfaces of the recesses are vertical to the substrates' main surfaces.Therefore, the side surfaces of the recesses cannot be seen when therecesses are seen from the second main surface side.

However, as shown in FIG. 24, like the recess 9C in the semiconductorsubstrate 7, the side surfaces 96 of the recess 9C may be inclined toform an angle θ exceeding 90° with the substrate main surface. Then,when the recess is seen from the second main surface side, the sidesurfaces of the recess can be seen. The peripheral region 7A (firstregion) has a thickness A and the central region 7B (second region) hasa thickness B.

In FIG. 24, the inclination angle that the side surfaces 96 form withthe bottom surface 95 is shown as angle θ just for convenience, assumingthat the bottom surface 95 is parallel to the substrate's main surface.The maximum value of the angle θ is around 175°.

When the semiconductor wafer with recesses 9C is slid during transfer,the side surfaces 96 inclined at an angle exceeding 90° prevent transfererrors and cuts of the angular portions of the recesses 9C that wouldotherwise occur as the angular portions are caught on some projectionsof the transfer system.

This also prevents accumulation of contaminants and unwanted deposits atthe corners of the bottom 95 of the recess 9C.

Further, when an electrode ML is formed all over the second main surfaceMS2 as shown in FIG. 4, or when a semiconductor region IP1 is formed inthe second main surface MS2 as shown in FIG. 5, this facilitatesformation of the electrodes ML and semiconductor region IP1 on the sidesurfaces.

Also, this of course facilitates formation of insulating films IL on thesides as shown in FIG. 8.

K. SEVENTH PREFERRED EMBODIMENT

Like the semiconductor substrate 3 shown in FIG. 11, a semiconductorsubstrate having a plurality of thicknesses can be obtained by forming aplurality of recesses at different depths; likewise, as shown in FIG.25, a plurality of recesses with the same depth may be formed so that aplurality of elements of the same kind can be fabricated.

That is to say, the semiconductor substrate 8 of FIG. 25 has a pluralityof recesses 9D defined by side surfaces 97 and bottom surfaces 98 in thesecond main surface MS2 opposite to the first main surface MS1. It thushas recessed regions 8B (second region) having a thickness B andcorresponding to the recesses 9D and the remaining mesa regions 8A(first region) having a thickness A.

FIG. 26 shows an example of plan view of the semiconductor substrate 8seen from the second main surface side. As shown in the plan view ofFIG. 26, the recesses 9D are shaped in stripes, where a plurality ofstripe-shaped recesses 9D are arranged in parallel in the main surfaceof the semiconductor substrate 8. In FIG. 26, a cross-section cut acrossthe plurality of recesses 9D corresponds to the sectional structure ofFIG. 26.

FIG. 27 shows another example of plan view of the semiconductorsubstrate 8. As shown in the plan view of FIG. 27, the recesses 9D arerectangular in shape, where a plurality of rectangular recesses 9D arearranged in a matrix in the main surface of the semiconductor substrate8.

K-1. STRUCTURE OF DEVICE

The seventh preferred embodiment of the invention now describes thestructure of a semiconductor device 700 manufactured using thesemiconductor substrate 8 shown in FIG. 25. It is assumed here that thesemiconductor substrate 8 is shaped as shown in FIG. 26 in plan view.

FIG. 28 shows the sectional structure of the semiconductor device 700according to the sixth preferred embodiment of the invention. Note thatthe cross-section of FIG. 28 shows a semiconductor device structure thatis formed with one recess 9D in the semiconductor substrate 8 of FIG.25. It is assumed that the semiconductor substrate 8 is processed as ahigh-resistivity N-type substrate.

In the semiconductor device 700 of FIG. 28, a P-type semiconductorregion 902 is formed in the entire first main surface MS1 of thesemiconductor substrate 8.

Two trenches 903 extend from the first main surface MS1 through theP-type semiconductor region 902 to reach the inside of the semiconductorsubstrate 8, with their inner walls covered by gate insulating films904. Each trench 903, covered by the gate insulating film 904, is filledwith a conductor to form a gate electrode 905.

In the surface of the P-type semiconductor region 902, relatively highconcentrated N-type semiconductor regions 906 are selectively formed insuch a way that at least parts of them are in contact with the gateinsulating films 904. With the N-type semiconductor regions 906 thusprovided on both sides of the two trenches 903, relatively highconcentration P-type semiconductor regions 907 are formed betweenopposite N-type semiconductor regions 906 between the trenches. TheP-type semiconductor regions 907 are provided to obtain good electriccontact with the P-type semiconductor region 902.

First main electrodes 908 are provided each in contact with top portionsof adjacent N-type semiconductor regions 906 and a P-type semiconductorregion 907.

The first main electrodes 908 apply potential to the N-typesemiconductor regions 906 and P-type semiconductor regions 907 from anexternal terminal ET. Depending on operation of the semiconductor device700, the first main electrodes 908 may function as the emitterelectrode, or the anode or source electrode. Control voltage is appliedto the gate electrodes 905 from an external terminal GT.

In the recess 9D in the second main surface MS2 of the semiconductorsubstrate 8, a P-type collector region 912 is provided in the surface ofthe semiconductor substrate 8 in the portion that corresponds to thebottom surface 98.

N-type semiconductor regions 913 reside in the surface of the mesaregion 8A of the second main surface MS2. Sidewall insulating films 914are formed on the side surfaces of the recess 9D to provide electricalseparation in the substrate surface between the P-type collector region912 and the N-type semiconductor regions 913.

A second main electrode 916 a and third main electrodes 916 b reside incontact with the P-type collector region 912 and the N-typesemiconductor regions 913.

The second main electrode 916 a applies potential to the P-typecollector region 912 from an external terminal CT and the third mainelectrodes 916 b apply potential to the N-type semiconductor regions 913from an external terminal KT. The second main electrode 916 a functionsas the collector electrode, and the third main electrodes 916 b functionas the cathode electrode or the drain electrode, depending on operationof the semiconductor device 700.

In the mesa region 8A, a lifetime control region 915 where carrierlifetime is shortened is provided close to the second main surface MS2.This region is formed by radiation of an electron beam or an ion beamsuch as proton or He.

The semiconductor device 700 operates as IGBT, diode, and MOSFET,depending on voltage conditions applied to the first to third mainelectrodes. That is to say, when the external terminal ET is at groundpotential and the external terminal CT is at positive potential, then itoperates as IGBT according to the signal applied to the externalterminal GT.

When the external terminal ET is at ground potential, the externalterminal KT is at negative potential, and the external terminal GT issupplied with an off signal, then it operates as diode.

Further, when the external terminal ET is at ground potential and theexternal terminal KT is at positive potential, it operates as MOSFETaccording to the signal applied to the external terminal GT.

In the semiconductor device 700, the P-type collector region 912 andN-type semiconductor regions 913 (cathode region) are formed at adistance so that it operates as IGBT when the external terminal CT andexternal terminal KT are at a same positive potential. That is to say,the distance between them (i.e. resistance value) is set so that, when aset small current flows to the cathode, the potential of thesemiconductor substrate in the vicinity of the collector region is notless than the work function difference of the PN junction.

When it operates as IGBT, the first main electrodes 908 serve as theemitter electrode, the second main electrode 916 a serves as thecollector electrode, the N-type semiconductor regions 906 in the firstmain surface MS1 serve as the emitter region, the P-type semiconductorregion 902 serves as the body region including channel region, and theP-type semiconductor regions 907 serve as the body contact region.

When it operates as diode, the first main electrodes 908 serve as theanode electrode, the third main electrodes 916 b serve as the cathodeelectrode, the P-type semiconductor region 902 in the first main surfaceMS1 serves as the anode region, the P-type semiconductor regions 907serve as the anode contact region, and the N-type semiconductor regions913 in the surface of the mesa region 8A on the second main surface MS2side serve as the cathode region.

When it operates as MOSFET, the first main electrodes 908 serve as thesource electrode, the third main electrodes 916 b serve as the drainelectrode, the N-type semiconductor regions 906 serve as the sourceregion, the P-type semiconductor region 902 serves as the body regionincluding channel region, the P-type semiconductor regions 907 serve asthe body contact region, and the N-type semiconductor regions 913 serveas the drain region.

K-2. MANUFACTURING

A method for manufacturing the semiconductor device 700 will now bedescribed referring to the cross-sectional views of FIGS. 29 to 33showing a sequence of process steps.

First, the semiconductor substrate 8 and a process for forming thecomponents on the first main surface MS l side are described referringto FIG. 28.

Since the components on the first main surface MS1 side are formedthrough conventionally known manufacturing steps for common IGBTs orMOSFETs, known technologies will not be explained.

As to the high-resistivity N-type semiconductor substrate 8, itsresistivity and the distance L between the bottom of P-type collectorregion 912 and the bottom of trench 903 vary depending on the voltageclass; for example, in 1200-V class, the resistivity is set at 40 to 60Ωcm and the distance L is set at about 100 to 200 μm, and theresistivity is set lower and the distance L is set shorter in lowervoltage classes.

When it operates as MOSFET and IGBT, the P-type semiconductor region 902serves as the body region including channel region, so that its impurityconcentration and depth are set on the basis of the threshold voltage ofthe MOSFET or IGBT.

The impurity concentration and diffusion depth are determined by ionimplantation conditions and thermal diffusion conditions. For example,the impurity concentration is usually set so that it is 1×10¹⁷/cm³ to1×10¹⁸/cm³ in the region in contact with the source electrode of MOSFETor emitter electrode of IGBT and the diffusion depth is set at severalμm so that it does not extend over the trenches 903.

The trenches 903 are provided by etching at a pitch of 2 to 10 μm, withtheir width at 0.5 to 3.0 μm and depth at 3 to 20 μm.

The gate insulating film 904 on the inner surfaces of the trenches 903is an insulating film forming MOSFET, whose thickness is optimized onthe basis of the gate driving voltage, saturation current, capacitance,etc. In general, a silicon oxide film having a thickness of 10 to 200 nmis formed by thermal oxidation or deposition, for example.

The gate electrodes 905 buried in the trenches 903 are formed of ahigh-impurity-concentration polycrystalline silicon film, a refractorymetal material like tungsten silicide, or a multi-layered film thereof.In general, they are obtained by depositing, on the first main surfaceMS1, a conductive film to a thickness not less than half the width ofthe trenches 903 and planarizing it by, e.g. anisotropic etching; theymay be obtained by forming a mask with given pattern throughphotolithography, depositing a conductive film, and etching it.

The optimum concentration for the P-type semiconductor region 902 variesdepending on the work function of the material of the gate electrodes905; in extreme cases, a buried channel structure may be adopted inwhich N-type semiconductor regions are formed along the sides of thetrenches 903 and a thin layer of the same conductivity type (N type) asthe emitter region is formed in regions in contact with the gateinsulating films.

The N-type semiconductor regions 906 and P-type semiconductor regions907 are both formed by patterning with photolithography and ionimplantation, whose surface concentration is set at 1×10²⁰/cm³ or more.

The first main electrodes 908 are made by forming an interlayerinsulating film (not shown) covering the N-type semiconductor regions906 and P-type semiconductor regions 907, selectively forming openingsby photolithography and etching, and depositing a conductive film of acompound of aluminum and silicon, for example.

A protective film (not shown) is formed on the first main electrodes 908and connection to an external power supply is made through openings ingiven areas of the protective film.

Next, a process for forming the components on the second main surfaceMS2 side is described referring to FIGS. 29 to 33. In the descriptionbelow, it is assumed that, the components on the first main surface MS1side that underlie the first main electrodes 908 have already beencompleted.

First, in the step shown in FIG. 29, after the formation of thecomponents under the first main electrodes 908 on the first main surfaceMS1 side, the first main surface MS1 is covered with a resist mask RM1.

Then a resist mask RM2 having an opening for the formation of recess 9Dis formed on the second main surface MS2 and the semiconductor substrate8 is etched by anisotropic etching using that resist mask RM2 to formthe recess 9D.

The depth of the recess 9D is optimized according to the voltage classof the semiconductor device 700, the final thickness of thesemiconductor substrate 8, cost, etc. In a range that cost permits, thedistance L (see FIG. 28) between the P-type collector region 912 and thebottom of trench 903 is set at 100 to 200 μm in 1200-V class, asmentioned earlier; the distance L is set shorter in lower voltageclasses.

The minimum value of the depth of the recess 9D is set so that IGBToperates when the same potential is applied to the P-type collectorregion 912 as the IGBT collector and the drain regions 913 (see FIG. 28)as MOSFET and a voltage is applied to the gate electrodes 905 such thata channel turns ON.

The depth of the recess 9D is thus determined on the basis of theresistivity of the mesa region 8A of the semiconductor substrate 8, theimpurity concentration of the P-type collector region 912, the arearatio between the P-type collector region 912 and N-type semiconductorregions 913, the rated current density, the allowable range of therelation between voltage and current when MOSFET operation changes toIGBT operation, i.e. the allowable range for snap back, and so forth.

The width and pitch of the recesses 9D can be set arbitrarily; the widthis typically 0.2 to 100 μm, which is set so that imbalance will notoccur in the area ratio between the P-type collector region 912 and theN-type semiconductor regions 913, as mentioned earlier.

The formation of the recess 9D may be performed at other stages thanthat mentioned above; however, it is desirable to form it beforeformation of the first main electrodes 908, when metal contamination byelectrode material, generally heavy metal, is taken into consideration.

Next, after removal of the resist mask RM2, in the process step shown inFIG. 30, an insulating film IL1 is formed all over the second mainsurface. The insulating film IL1 is formed by selective oxidation ordeposition.

Then, in the process step shown in FIG. 31, an anisotropic etchingprocess is applied so that it remains as sidewall insulating films 914only on the side surfaces 97 of the recess 9D.

The sidewall insulating films 914 can be formed either before or afterthe formation of the P-type collector region 912 and the N-typesemiconductor regions 913; however, it is desirable to form the sidewallinsulating films 914 before formation of the N-type semiconductorregions 913 and P-type collector region 912 because several percent toseveral tens of percent of the impurities for their formation may beintroduced into the regions corresponding to the side surfaces 97 of therecess 9D.

Next, after formation of the N-type semiconductor regions 913 by ionimplantation into the surface of the mesa region 8A on the second mainsurface MS2 side, in the process step shown in FIG. 32, a resist maskRM3 having an opening corresponding to the recess 9D is formed on thesecond main surface MS2. Then the P-type collector region 912 is formedby ion implantation into the surface of the semiconductor substrate 8 inthe bottom surface 98 of the recess 9D. The ion implantation forformation of the P-type collector region 912 preferably adopts aninclined rotational ion implantation process in which ions are implantedin an inclined direction, with the substrate inclined and rotated.

The impurity concentrations of the P-type collector region 912 and theN-type semiconductor regions 913 are both set in the range of1×10^(16 to) 1×10²¹/cm³. Basically, either of them may be formed first,but it is desirable to form the P-type collector region 912 first, aswill be explained later.

Next, after removal of the resist mask RM3, in the process step shown inFIG. 33, the recess 9D is covered with a resist mask RM4 and then anelectron beam or proton or He ions, for example, are applied from thesecond main surface MS2 side to form a crystal defect region in aportion of the mesa region 8A close to the second main surface MS2, thusforming the lifetime control region 915 with shortened carrier lifetime.

The formation of the lifetime control region 915 may be performed atother stages than that mentioned above, but it is desirably formed afterannealing of the P-type collector region 912 and the N-typesemiconductor regions 913, because a lesser degree of activation byannealing suffices for the lifetime control region 915 than for theactivation of the P-type collector region 912 and N-type semiconductorregions 913.

When the semiconductor device 700 operates as diode, the lifetimecontrol region 915 suppresses carrier amplification rate and enhancesrecovery characteristic.

Subsequently, after removal of the resist masks RM1 and RM4, the firstmain electrodes 908 are formed on the first main surface MS1 and thesecond main electrode 916 a and third main electrodes 916 b are formedon the second main surface, thus completing the semiconductor device700.

In order to prevent metal contamination, it is desirable to form thesecond main electrode 916 a and third main electrodes 916 b in the finalstep of the wafer process because they are made of a multi-layered metalfilm containing gold or silver.

The semiconductor device 700 of FIG. 28 has shown a structure in whichthe second main electrode 916 a resides at the bottom 98 of the recess9D in direct contact with the P-type collector region 912 and isconnected to the external terminal CT; however, in practice, as shown inFIG. 34, for example, the recess 9D is filled with a conductor layer 920and the second main electrode 916 a is formed not at the bottom 98 ofthe recess 9D but on the surface of the conductor layer 920. Thisstructure facilitates connection with the external terminal CT andfilling the recess 9D with the conductor layer 920 increases themechanical strength of the semiconductor substrate 8, which facilitateshandling of the semiconductor substrate 8 during the semiconductordevice manufacturing process.

The conductor layer 920, which is a refractory metal layer such astungsten (W) or titanium (Ti), is buried in the recess 9D after theformation of the P-type collector region 912 described referring to FIG.32. It is desirable to fill the recess 9D in an earlier stage of themanufacturing process; forming the N-type semiconductor regions 913 andthe lifetime control region 915 after the recess 9D has been filledmeans that the ion implantation processes are applied to mechanicallystrengthened semiconductor substrate 8, which facilitates handling, e.g.transfer, of the semiconductor substrate 8.

Also, the semiconductor device 700 of FIG. 28 has shown the second mainelectrode 916 a and third main electrodes 916 b as independentelectrodes; however, as shown in FIG. 35 as a semiconductor device 700A,the recess 9D may be filled with conductor layer 920 with a common mainelectrode 916 lying over both of the surfaces of the N-typesemiconductor regions 913 and the surface of the conductor layer 920.The common main electrode 916 is connected to the external terminal CT.

With this structure, when a same positive potential is applied to theN-type semiconductor regions 913 and P-type collector region 912, thesemiconductor device 700A can operate as IGBT since the P-type collectorregion 912 and the N-type semiconductor regions 913 (cathode region) areseparated at a distance.

When the semiconductor device 700A operates as IGBT, the first mainelectrodes 908 serve as the emitter electrode, the common main electrode916 serves as the collector electrode, the N-type semiconductor regions906 in the first main surface MS1 serve as the emitter region, theP-type semiconductor region 902 serves as the body region includingchannel region, and the P-type semiconductor regions 907 serve as thebody contact region.

Also, it operates as diode when the external terminal ET is at groundpotential, the common main electrode 916 is at negative potential, andthe external terminal GT is supplied with an off signal.

In this case, the first main electrodes 908 serve as the anodeelectrode, the common main electrode 916 serves as the cathodeelectrode, the P-type semiconductor region 902 in the first main surfaceMS1 serves as the anode region, the P-type semiconductor regions 907serve as the anode contact region, and the N-type semiconductor regions913 in the surface of the mesa region 8A on the second main surface MS2side serve as the cathode region.

In the semiconductor device 700A, only the common main electrode 916 isformed on the second main surface MS2, which simplifies themanufacturing process as compared with a process in which a plurality ofmain electrode patterns are formed on the second main surface MS2 side.

L. FIRST MODIFICATION

The semiconductor devices 700 and 700A of the seventh preferredembodiment have shown structures in which the N-type semiconductorregions 913 are provided in the surface of the mesa region 8A on thesecond main surface MS2 side; however, as shown in FIG. 36 as asemiconductor device 700B, P-type semiconductor regions 912 a mayreplace the N-type semiconductor regions 913.

This structure does not need electrical separation between the P-typecollector region 912 and the P-type semiconductor regions 912 a, whichremoves the need for sidewall insulating films on the side surfaces ofthe recess 9D.

The semiconductor device 700B has a recess 9D filled with a conductorlayer 920 with a common main electrode 916 lying over the surfaces ofboth of the P-type semiconductor regions 912 a and the conductor layer920. The common main electrode 916 is connected to the external terminalCT.

With this structure, when a same positive potential is applied to theP-type collector region 912 and P-type semiconductor regions 912 a, thesemiconductor device 700B can operate as IGBT.

That is to say, when the semiconductor device 700B operates as IGBT, thefirst main electrodes 908 serve as the emitter electrode, the commonmain electrode 916 serves as the collector electrode, the N-typesemiconductor regions 906 in the first main surface MS1 serve as theemitter region, the P-type semiconductor region 902 serves as the bodyregion including channel region, and the P-type semiconductor regions907 serve as the body contact region.

In the semiconductor device 700B, as stated above, no sidewallinsulating films reside on the sides of the recess 9D and the conductorlayer 920 buried in the recess 9D is in contact with the N-typesemiconductor substrate 8 in the portions defining the sides of therecess 9D; therefore, during IGBT operation, electrons can easily flowto the external terminal CT through the conductor layer 920 to enablehigh-speed operation.

M. SECOND MODIFICATION

In the semiconductor devices 700 and 700A of the seventh preferredembodiment, N-type semiconductor regions 913 are provided in the surfaceof the mesa region 8A on the second main surface MS2 side; however, asshown in FIG. 37 as a semiconductor device 700C, P-type semiconductorregions 912 a may replace the N-type semiconductor regions 913, withP-type semiconductor regions 912 b formed in the surface of the N-typesemiconductor substrate 8 in the portions defining the sides of therecess 9D, where the P-type collector region 912 and the P-typesemiconductor regions 912 a are thus electrically connected through theP-type semiconductor regions 912 b.

Also in the semiconductor device 700C, the recess 9D is filled with aconductive layer 920 and a common main electrode 916 is disposed overthe surfaces of the P-type semiconductor regions 912 a and the conductorlayer 920. The common main electrode 916 is connected to the externalterminal CT.

With this structure, when a same positive potential is applied to theP-type collector region 912 and P-type semiconductor regions 912a, thesemiconductor device 700C can operate as IGBT.

That is, when the semiconductor device 700C operates as IGBT, the firstmain electrodes 908 serve as the emitter electrode, the common mainelectrode 916 serves as the collector electrode, the N-typesemiconductor regions 906 in the first main surface MS1 serve as theemitter region, the P-type semiconductor region 902 serves as the bodyregion including channel region, and the P-type semiconductor regions907 serve as the body contact region.

As stated above, in the semiconductor device 700C, the P-typesemiconductor regions 912 b reside in the surface of the N-typesemiconductor substrate 8 in the portions defining the sides of therecess 9D and the recess 9D is filled with the conductor layer 920;therefore, during IGBT operation, holes can easily flow into thesemiconductor device 700C from the external terminal CT through theP-type semiconductor regions 912 b, which enables high-speed operation.

Furthermore, the existence of the P-type collector region 912, P-typesemiconductor regions 912 a and P-type semiconductor regions 912 boffers an increased area of P-type impurity region, which increasescurrent during IGBT operation and reduces the on-state voltage.

The P-type semiconductor regions 912 b can be formed withoutcomplicating the manufacturing process, by utilizing the inclinedrotational ion implantation process that is performed to form the P-typecollector region 912 in the surface of the semiconductor substrate 8 inthe portion corresponding to the bottom 98 of the recess 9D. In thiscase, the P-type semiconductor regions 912 b can be formed by furtherinclining the substrate than it is inclined for the formation of theP-type collector region 912.

N. EXAMPLES OF APPLICATION

While the semiconductor device 700 described as the seventh preferredembodiment has common trench-type elements on the first main surface MS1side, modified structures of trench-type elements may be adopted on thefirst main surface MS1 side, or planar-type elements may be adopted.Thyristor structure may also be adopted in place of the transistorstructure.

While it is assumed in the semiconductor device 700 that thesemiconductor substrate 8 is of N type, it can of course be P type.

The semiconductor device 700 has the P-type collector region 912 at thebottom of the recess 9D; however, the P-type collector region may beremoved if the bottom surface of the recess 9D substantially functionsas a P-type region without the need for introduction of P-typeimpurities, depending on the crystalline roughness of the bottom surfaceof the recess 9D, for example.

As to the roughness of the bottom surface, a rougher surface offers moreP-type characteristics, and even when P-type impurities are introduced,the rougher the recess's bottom surface becomes, the smaller the carrieremission energy at the acute corners becomes, which facilitates holeinjection and reduces on-state voltage.

The on-state voltage reduction effect provided by roughening the surfaceof the P-type collector region can be applied also to so-called NPT(non-punch-through) type IGBTs in which no recess exists in the secondmain surface MS2 of the semiconductor substrate 8 and the depth of theP-type collector region is 2.0 μm or less.

Also, while the semiconductor device 700 has shown the second mainelectrode 916 a and the third main electrodes 916 b connectedrespectively to the external terminal CT and the external terminal KT,the second main electrode 916 a and the third main electrodes 916 b maybe connected through the sidewall insulating films 914.

Furthermore, while the semiconductor device 700 has lifetime controlregion 915 for suppressing recovery as diode, it can be removeddepending on specifications of the semiconductor device 700.

On the other hand, depending on the impurity concentration of the P-typecollector region 912, it may be desirable to form a lifetime controlregion 915 also in a portion closer to the first main surface MS1 thanthe P-type collector region 912. Or a lifetime control region may beformed substantially in the entirety of the semiconductor substrate 8.

While the invention has been described in detail, the foregoingdescription is in all aspects illustrative and not restrictive. It isunderstood that numerous other modifications and variations can bedevised without departing from the scope of the invention.

1-20. (canceled)
 21. A semiconductor device comprising: a first mainelectrode provided on a first main surface of a semiconductor substrate;and a second main electrode provided on a second main surface of saidsemiconductor substrate, wherein a main current flows in a thicknessdirection of said semiconductor substrate, wherein said semiconductorsubstrate has at least one recess formed in said second main surface andtherefore said semiconductor substrate at least has a first regionhaving a first thickness and a second region having a second thicknessthat is thinner than said first thickness, said second regioncorresponds to a region where said at least one recess is formed, saidsecond main electrode is provided in said at least one recess, and saidsecond thickness is set at such a thickness as to keep a breakdownvoltage of said semiconductor device.
 22. The semiconductor deviceaccording to claim 21, wherein said second main electrode is formed of amaterial that makes ohmic contact or Schottky contact with saidsemiconductor substrate.
 23. The semiconductor device according to claim21, further comprising a semiconductor region provided in a surface ofsaid semiconductor substrate in a portion corresponding to a bottom ofsaid at least one recess, said semiconductor region having a higherimpurity concentration than said semiconductor substrate.
 24. Thesemiconductor device according to claim 23, wherein said semiconductorregion has a conductivity type opposite to that of said semiconductorsubstrate.
 25. The semiconductor device according to claim 23, whereinsaid semiconductor region has a same conductivity type as saidsemiconductor substrate.
 26. The semiconductor device according to claim21, wherein said recess is located substantially in a center of saidsemiconductor device.
 27. The semiconductor device according to claim21, further comprising an insulating film provided in a surface of saidsemiconductor substrate in a portion corresponding to a side of said atleast one recess.
 28. The semiconductor device according to claim 21,further comprising a field contact ring provided in said first mainsurface of said semiconductor substrate, for alleviating an electricfield in a peripheral portion of said semiconductor device, wherein saidsecond region is provided in an area surrounded by said field contactring.
 29. The semiconductor device according to claim 28, wherein saidfield contact ring is provided in said first main surface of saidsemiconductor substrate in a portion corresponding to said first region.30. The semiconductor device according to claim 21, wherein a side ofsaid at least one recess is inclined at an angle exceeding 900 withrespect to said second main surface.
 31. The semiconductor deviceaccording to claim 21, wherein said semiconductor substrate has a firstconductivity type, and wherein said semiconductor device furthercomprises: a first semiconductor region having a second conductivitytype and provided in the entirety of said first main surface of saidsemiconductor substrate; a trench formed to extend from said first mainsurface and pass through said first semiconductor region; a gateinsulating film covering an inner surface of said trench; a gateelectrode buried in said trench and surrounded by said gate insulatingfilm; a second semiconductor region having said first conductivity typeand selectively provided in a surface of said first semiconductorregion, a portion of said second semiconductor region being in contactwith said gate insulating film; a third semiconductor region having saidsecond conductivity type and provided in a surface of said semiconductorsubstrate in a portion corresponding to a bottom of said at least onerecess; a fourth semiconductor region having the first conductivity typeand provided in a surface of said first region on said second mainsurface side; and a third main electrode in contact with said fourthsemiconductor region, and wherein said first main electrode is incontact with said second semiconductor region, and said second mainelectrode is electrically connected to said third semiconductor region.32. The semiconductor device according to claim 31, wherein said atleast one recess is filled with a conductor layer, said thirdsemiconductor region is in contact with said conductor layer, and saidsecond main electrode is provided on a surface of said conductor layer.33. The semiconductor device according to claim 32, wherein said secondmain electrode and said third main electrode are formed as a common mainelectrode extending over both of a surface of said fourth semiconductorregion and the surface of said conductor layer.
 34. The semiconductordevice according to claim 31, further comprising a lifetime controlregion where carrier lifetime is shortened, said lifetime control regionbeing provided in said first region and closer to said second mainsurface than said third semiconductor region.
 35. The semiconductordevice according to claim 31, further comprising a lifetime controlregion where carrier lifetime is shortened, said lifetime control regionbeing provided in said first region and closer to said first mainsurface than said third semiconductor region.
 36. The semiconductordevice according to claim 31, further comprising an insulating filmprovided on the surface of said semiconductor substrate in a portioncorresponding to a side of said recess.
 37. The semiconductor deviceaccording to claim 31, wherein said recess has such a depth that adistance between a bottom of said third semiconductor region and abottom of said trench is 100 to 200 μm.
 38. The semiconductor deviceaccording to claim 31, wherein said recess has a width in the range of0.2 to 100 μm.
 39. The semiconductor device according to claim 21,wherein said first thickness is set in the range of 500 to 650 μm andsaid second thickness is set at around 60 μm.
 40. A semiconductor devicecomprising: a first main electrode provided on a first main surface of asemiconductor substrate; and a second main electrode provided on asecond main surface of said semiconductor substrate, wherein a maincurrent flows in a thickness direction of said semiconductor substrate,wherein said semiconductor substrate has at least one recess formed insaid second main surface and therefore said semiconductor substrate atleast has a first region having a first thickness and a second regionhaving a second thickness that is thinner than said first thickness, andwherein said second thickness is set at such a thickness as to keep abreakdown voltage of said semiconductor device, said second regioncorresponds to a region where said at least one recess is formed, saidat least one recess is filled with a conductor layer, and said secondmain electrode is provided on a surface of said conductor layer.